Bulk acoustic wave structures with conductive bridge structures and fabrication methods thereof

Abstract

A bulk acoustic wave (BAW) resonator structure is provided. The BAW resonator structure includes a transducer that includes a first electrode, a second electrode, a piezoelectric layer between the first electrode and the second electrode, a dielectric layer in contact with the piezoelectric layer on a surface of the piezoelectric layer, and a conductive layer over the first electrode. The transducer also includes a conductive bridge portion in contact with the first electrode, the conductive layer, and over and in contact with the dielectric layer. The conductive bridge portion and the conductive layer form a conductive bridge structure between ends of the first electrode.

Dependencies are inferred from the claim text.