Method and system to stabilize a frequency sum generated laser
AssigneeASML Netherlands B.V.
InventorsMaarten Jozef JANSEN, Eduard Martinus KLARENBEEK, Manoj Kumar MRIDHA, Ping LIU
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Abstract
The disclosure provides a method of operating a sum-frequency laser, comprising the steps of simultaneously emitting a first light beam having a first frequency from a first light source and a second light beam having a second frequency from a second light source; modulating the first frequency in a first direction and modulating the second frequency in opposite direction and with matched tuning frequencies; and sending the first and second light beams to a summing device and outputting a stabilized sum-frequency light beam from the summing device.
Claims14
1-14. (canceled)
A method of operating a sum-frequency laser, comprising:
- simultaneously emitting a first light beam having a first frequency from a first light source and a second light beam having a second frequency from a second light source;
- modulating the first frequency in a first direction and modulating the second frequency in an opposite direction and with matched tuning frequencies;
- sending the first and second light beams to a summing device and outputting a stabilized sum-frequency light beam from the summing device;
- detecting a sidemode in one of the first light beam and the second light beam;
- and
- reversing the modulation direction of the first frequency and the second frequency in response to the detected sidemode exceeding a predetermined threshold.
Dependencies are inferred from the claim text.