Structural member

Abstract

A structural member including a protective film having high durability against plasma is provided. The structural member 10 includes a base material 100 and a protective film 200 including yttria as a main component, the protective film 200 covering the surface 110 of the base material 100. In a diffraction pattern obtained by analyzing the surface 210 of the protective film 200 using X-ray diffraction, P1/(P1+P2+P3+P4+P5+P6)>0.015 is satisfied, where P1 represents a maximum intensity of a peak attributed to the (622) plane of a cubic crystal structure, P2 represents a maximum intensity of a peak attributed to the (211) plane of a cubic crystal structure, P3 represents a maximum intensity of a peak attributed to the (222) plane of a cubic crystal structure, P4 represents a maximum intensity of a peak attributed to the (400) plane of a cubic crystal structure, P5 represents a maximum intensity of a peak attributed to the (440) plane of a cubic crystal structure, and P6 represents a maximum intensity of a peak attributed to the (541) plane of a cubic crystal structure.

Dependencies are inferred from the claim text.