System and method for a double-sided atmospheric plasma head
AssigneeOntos Equipment Systems, Inc.
InventorDAVID MEYER
Life of this patent
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Abstract
A double-sided atmospheric pressure plasma head generates two glow discharge-type plasma gases that are directed in opposite directions. A double-sided atmospheric plasma head includes a single plasma source that has two separate internal process gas paths and two separate RF zones that generate two separate plasma gases that exit the plasma head through two separate output slits. The two separate gas paths and the two separate RF zones are coupled to the same single source, thus enabling a single control system to operate the two opposite directed plasmas simultaneously.
Claims16
An atmospheric pressure plasma system comprising:
- a double-sided atmospheric pressure plasma source that comprises a single plasma head that generates two collinear and opposite directed glow discharge-type plasmas;
- wherein the single plasma head comprises a gas inlet, two separate collinear and opposite to each other internal process gas passages, a two-zone radio frequency (RF) electrode that generates two separate plasma gases in the two separate gas passages, and wherein the two separate plasma gases exit the plasma head through two separate and opposite to each other output slits, respectively.
A method for generating an atmospheric pressure plasma comprising:
- providing a double-sided atmospheric pressure plasma source that comprises a single plasma head and generating two collinear and opposite directed glow discharge-type plasmas;
- wherein the single plasma head comprises a gas inlet, two separate collinear and opposite to each other internal process gas passages, a two-zone radio frequency (RF) electrode that generates two separate plasma gases in the two separate gas passages, and wherein the two separate plasma gases exit the plasma head through two separate and opposite to each other output slits, respectively.
A method for treating with an atmospheric plasma and activating two separate surfaces arranged in two opposite directions simultaneously, comprising:
- providing a double-sided atmospheric pressure plasma source that comprises a single plasma head and generating two collinear and opposite directed glow discharge-type plasmas, wherein the single plasma head comprises a gas inlet, two separate collinear and opposite to each other internal process gas passages, a two-zone radio frequency (RF) electrode that generates two separate plasma gases in the two separate gas passages, and wherein the two separate plasma gases exit the plasma head through two separate and opposite to each other output slits, respectively;
- aligning a first bonding surface of a first chip and a first bonding surface of a wafer;
- inserting the double-sided atmospheric plasma source into a space between the aligned first bonding surfaces of the first chip and the wafer;
- activating simultaneously the first bonding surfaces of the first chip and the wafer with the two collinear and opposite directed glow discharge-type plasmas of the double-sided atmospheric plasma source;
- removing the double-sided atmospheric plasma source;
- and
- bonding the activated and aligned first bonding surfaces of the first chip and the first wafer.
Dependencies are inferred from the claim text.