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US 2026/0235952 A1Published application
Copolymer, positive resist composition, and method of forming resist pattern
AssigneeZeon Corporation
InventorsAkiya KAWAUE, Masaya UMEDA
Life of this patent
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Abstract
Provided are a copolymer and a positive resist composition that have a wide exposure margin and that can form a resist pattern having a good shape. The copolymer includes a monomer unit (I) represented by formula (I), shown below, a monomer unit (II) represented by formula (II), shown below, and a monomer unit (III) represented by formula (III), shown below. In the formulae, R1 to R14 are specific groups and p is an integer of not less than 0 and not more than 5.
Claims7
A copolymer comprising:
- a monomer unit (I) represented by formula (I), shown below:
- where, in formula (I), R1 is a halogen atom or a halogen atom-substituted alkyl group, R2 is a fluorine atom-containing organic group, and R3 and R4 are each a hydrogen atom, a halogen atom, an unsubstituted alkyl group, or a halogen atom-substituted alkyl group and may be the same as or different from each other;
- a monomer unit (II) represented by formula (II), shown below:
- where, in formula (II), R5 is a halogen atom or a halogen atom-substituted alkyl group, R6, R7, and R8 are each a hydrogen atom or an optionally substituted aliphatic group that does not include a fluorine atom and may be the same as or different from one another, R6, R7, and R8 may form a ring structure with a carbon atom that is bonded thereto, and R9 and R10 are each a hydrogen atom or an unsubstituted alkyl group and may be the same as or different from each other;
- and
- a monomer unit (III) represented by formula (III), shown below:
- where, in formula (III), R11 and R12 are each a hydrogen atom or an unsubstituted alkyl group and may be the same as or different from each other, R13 is an optionally substituted alkyl group, R14 is a halogen atom or an organic group, and p is an integer of not less than 0 and not more than 5.
4 more elements
Dependencies are inferred from the claim text.