Pixelated scintillator
AssigneeKoninklijke Philips N.V.
InventorsJOHANNES WILHELMUS MARIA JACOBS, MATTHIAS SIMON
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AssigneeKoninklijke Philips N.V.
InventorsJOHANNES WILHELMUS MARIA JACOBS, MATTHIAS SIMON
Estimating the term…
The present invention relates to a method of manufacturing a pixelated scintillator. According to the method, first laser radiation is irradiated (S110) to a plurality of first regions of a substrate according to a predefined geometry of the pixelated scintillator to cause a structural modification of a material in the plurality of first regions of the substrate such that once the substrate is subjected to etching, the etching occurs at a higher rate at the plurality of irradiated first regions than at a non-irradiated region. The etching (S120) is performed to form a plurality of first openings having the predefined geometry of the pixelated scintillator. The plurality of first openings are filled (S130) with at least one scintillator material to form the pixelated scintillator. The resulting pixelated scintillator embedded in the substrate may be bonded to a corresponding photosensitive read-out sensor substrate. This may enable realization of cost-effective, parallax-free, single-or multi-layer radiation detectors with enhanced spatial resolution and sensitivity.
A method of manufacturing a pixelated scintillator, the method comprising:
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A radiation detector, comprising:
A manufacturing system for manufacturing a pixelated scintillator, the system comprising:
(canceled)
(canceled)
Dependencies are inferred from the claim text.