Probe structure and inspection apparatus

Abstract

To make it possible to obtain matching of characteristic impedance at a connection terminal as a signal circuit relay point. The present disclosure provides a probe structure configured to transmit/receive a high-frequency signal to/from a device under test via a contact portion in electrical contact with an electrode of the device under test, the probe structure comprising: a main body part; a substrate holding member including a wiring substrate on one surface and fixed to the main body part on the other surface; a connector bonded to the wiring substrate of the substrate holding member and connecting wiring of the wiring substrate and a coaxial cable via a connection terminal; and an impedance adjustment unit configured to adjust a gap with the connection terminal to match an impedance.

Dependencies are inferred from the claim text.