Gas sensor
AssigneeAsahi Kasei Microdevices Corporation
InventorsKeiichiro KUWATA, Takaaki FURUYA
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Abstract
A gas sensor that includes a substrate and a light-guiding member 5. The light-guiding member 5 includes a first reflector 51 and a second reflector 52 that reflect at least a portion of light emitted by a light emitter, and is integrally formed to include the first reflector 51 and the second reflector 52. The first reflector 51 and the second reflector 52 are arranged to face each other in a plan view of the gas sensor. The light-guiding member 5 includes a strain absorber 5a between the first reflector 51 and the second reflector 52 in the plan view, which is capable of absorbing strain generated in the substrate and/or the light-guiding member 5.
Claims10
A gas sensor comprising:
- a substrate comprising, on a main surface thereof, a light emitter configured to emit light and a light receiver configured to receive at least a portion of the light emitted by the light emitter;
- and
- a light-guiding member joined to the substrate on the side of the main surface of the substrate and configured to guide at least a portion of the light emitted by the light emitter to the light receiver, wherein
- the light-guiding member comprises a first reflector and a second reflector that each reflect at least a portion of the light emitted by the light emitter, and is integrally formed including the first reflector and the second reflector,
- the first reflector and the second reflector are disposed to face each other in a plan view of the gas sensor, and
- the light-guiding member comprises a strain absorber between the first reflector and the second reflector in the plan view, the strain absorber being capable of absorbing strain generated in the substrate and/or the light-guiding member.
Dependencies are inferred from the claim text.