US 2026/0235538 A1Published application

Microprobe system using xrd

AssigneeNextron Corporation

InventorsHak Beom MOON, Yun Hyeong JANG, Ji Su SEONG

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Abstract

A microprobe system using XRD includes: a housing which includes a first housing providing an inspection space for inspecting the characteristics of a specimen and having one side formed to be open and a second housing connected to one side of the first housing to seal the inspection space; a vacuum port formed through the housing to form a vacuum in the inspection space; a temperature control part having a stage formed thereon and configured to control the temperature of a specimen, the specimen being positioned on the stage; at least one probe module disposed in the inspection space and applying a voltage to the specimen; and a signal port formed through the housing to transmit or receive an electric signal to or from the probe module, wherein X-rays may be emitted from the outside to the stage.

Claims10

Dependent claims

A microprobe system using X-ray diffraction (XRD) comprising:

a housing configured to provide an inspection space to inspect a characteristic of a specimen and further comprising a first housing having one side formed to be open and a second housing connected to the one side of the first housing so that the inspection space is sealed;
a vacuum port formed through the housing so that a vacuum is formed in the inspection space;
a temperature controller in which a stage in which the specimen is positioned is formed in an upper portion and configured to control a temperature of the specimen;
at least one probe module disposed inside the inspection space and configured to apply voltage to the specimen;
and
a signal port formed through the housing to transmit and receive an electrical signal to and from the probe module, wherein an X-ray is irradiated to the stage from an outside.

3 more elements

Dependencies are inferred from the claim text.