High resolution computed tomography using compucentric rotational axis
OwnerShiqi XU, Matthew ANDREW +4inventors
InventorsShiqi XU, Matthew ANDREW, Gerhard KRAMPERT, Brian SMYTH, Bernard EDQUILANG, Faguo YANG
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OwnerShiqi XU, Matthew ANDREW +4inventors
InventorsShiqi XU, Matthew ANDREW, Gerhard KRAMPERT, Brian SMYTH, Bernard EDQUILANG, Faguo YANG
Estimating the term…
A high-resolution computed tomography technique employs a “compucentric” rotational axis to keep the region of interest (ROI) centered in the detector's field of view at all angles. The system calibrates mechanical and optical misalignments by capturing projections of a high-contrast object at multiple positions. The resulting geometry model, including stage runout and thermal drift corrections, is then applied to the sample of interest. Each projection view is associated with specific positioning parameters, ensuring accurate data registration for reconstruction. By using a virtual rotation axis and per-view geometry descriptors, the method produces superior resolution and fewer artifacts than tomography created from misaligned systems, and involves more labor than conventional physical alignment techniques.
A method for performing computed tomography with an X-ray microscopy system, the method comprising:
A computed tomography X-ray microscopy system configured for high-resolution tomographic imaging under compucentric conditions, the system comprising:
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