Apparatus and methods to determine hole blockage in a showerhead
AssigneeLam Research Corporation
InventorsBruce Christopher Bingham, Aleksey V. Altecor, Curtis W. Bailey, Yogesh Babbar
Life of this patent
Estimating the term…
Abstract
Method of operating an apparatus to determine hole blockage in a showerhead includes operating an illumination structure to direct light into a cavity within the showerhead. In at least one implementation, a method further includes collecting the light emanating from exit holes in the showerhead and analyzing intensity of the light emanating from the exit holes to determine blockage of the exit holes.
Claims25
An illumination structure comprising:
- a light source;
- and
- a light pipe comprising a light transmitting material, a first end, and a second end, wherein the first end of the light pipe is configured to couple to the light source and the second end is configured to extend at least partially into a showerhead.
An illumination structure comprising:
- a light source;
- and
- a rod comprising a hole, a first end, and a second end, wherein the hole is along a longitudinal direction of the rod, wherein the first end of the rod is to couple with the light source, wherein the light source at least partially covers the hole, and wherein the second end of the rod is configured to extend at least partially into an entrance hole of a showerhead.
A method of operating an apparatus to determine hole blockage in a showerhead, the method comprising:
- operating an illumination structure to direct light through an entrance hole and into a cavity within a showerhead;
- collecting the light emanating from exit holes in the cavity, wherein the exit holes are opposite to the entrance hole;
- and
- measuring intensity of the light emanating from the exit holes to determine blockage of the exit holes.
Dependencies are inferred from the claim text.