Inspection apparatus and method for inspecting semiconductor device
AssigneesKabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
InventorIkuo MOTONAGA
Life of this patent
Estimating the term…
Abstract
According to one embodiment, an inspection apparatus for inspecting a semiconductor device contained in a rectangular pocket included in carrier tape includes an acquiring unit, a detecting unit, a generating unit, and an inspecting unit. The acquiring unit is configured to acquire an inspection image obtained by imaging the semiconductor device with an imaging device. The detecting unit is configured to determine a contour of the pocket by performing edge detection on the inspection image. The generating unit is configured to generate a mask corresponding to a region extending inward from the determined contour by a predetermined width. The inspecting unit is configured to inspect the semiconductor device with the mask set in the inspection image.
Claims21
An inspection apparatus for inspecting a semiconductor device, the semiconductor device being contained in a rectangular pocket included in carrier tape, the inspection apparatus comprising:
- an acquiring unit configured to acquire an inspection image obtained by imaging the semiconductor device with an imaging device;
- a detecting unit configured to determine a contour of the pocket by performing edge detection on the inspection image;
- a generating unit configured to generate a mask corresponding to a region extending inward from the determined contour by a predetermined width;
- and
- an inspecting unit configured to inspect the semiconductor device with the mask set in the inspection image.
An inspection apparatus for inspecting a semiconductor device, the semiconductor device being contained in a rectangular pocket included in carrier tape, the inspection apparatus comprising:
- an acquiring unit configured to acquire an inspection image obtained by imaging the semiconductor device with an imaging device;
- a detecting unit configured to perform edge detection on the inspection image to determine a contour of a bottom surface of the pocket;
- a generating unit configured to generate a mask corresponding to a region extending outward from the determined contour by a predetermined width;
- and
- an inspecting unit configured to inspect the semiconductor device with the mask set in the inspection image.
A method for inspecting a semiconductor device, the semiconductor device being contained in a rectangular pocket included in carrier tape, the method comprising:
- acquiring an inspection image obtained by imaging the semiconductor device with an imaging device;
- generating a mask corresponding to a region between a contour of the pocket and a contour of a bottom surface of the pocket;
- and
- inspecting the semiconductor device with the mask set in the inspection image.
Dependencies are inferred from the claim text.