Light-guiding member and gas sensor
AssigneeAsahi Kasei Microdevices Corporation
InventorsHiroki UMEDA, Yuji GODA
Life of this patent
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Abstract
A light-guiding member 5 for a gas sensor is attached to a main surface side of a substrate, the light-guiding member 5 has a first surface 5ts that is attached to a main surface in the light-guiding member to form a cavity into which a gas is introduced between the main surface of the substrate and the first surface 5ts, and that has a ventilation opening 7 formed therein and communicating with the cavity. The ventilation opening 7 includes at least one beam 8 extending between edges 7es, 7el of the ventilation opening 7. The at least one beam 8 has a length in a plane-normal direction perpendicular to the first surface 5ts that is longer than a minimum length L8s of the at least one beam 8 in an in-plane direction of the first surface 5ts.
Claims9
A light-guiding member for a gas sensor, attached to a main surface side of a substrate having a light emitter and a light receiver on the main surface side, the light emitter configured to emit light and the light receiver configured to receive at least a portion of the light emitted by the light emitter, the light-guiding member being configured to guide at least a portion of the light emitted by the light emitter to the light receiver, wherein
- the light-guiding member comprises a first surface that is attached to a main surface in the light-guiding member to form a cavity into which a gas is introduced between the main surface of the substrate and the first surface, and that has a ventilation opening formed therein and communicating with the cavity, the ventilation opening includes at least one beam extending between edges of the ventilation opening, and the at least one beam has a length in a plane-normal direction perpendicular to the first surface that is longer than a minimum length of the at least one beam in an in-plane direction of the first surface.
Dependencies are inferred from the claim text.