Measurement apparatus and control method
AssigneeYokogawa Electric Corporation
InventorGou Ou
Life of this patent
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Abstract
A measurement apparatus measures thickness of an object to be measured using radiation. The measurement apparatus includes a blocker able to block radiation emitted by a radiation source, controllers that control unblocking and blocking of radiation by opening and closing the blocker, and detectors that detect intruders at a boundary of a defined area including the radiation source. The controllers close the blocker to block radiation when the detectors detect an intruder at the boundary of the defined area.
Claims7
A measurement apparatus for measuring thickness of an object to be measured using radiation, comprising:
- a blocker able to block the radiation emitted by a radiation source;
- a controller configured to control unblocking and blocking of the radiation by opening and closing the blocker;
- and
- a detector configured to detect an intruder at a boundary of a defined area that includes the radiation source, wherein
- the controller closes the blocker to block the radiation when the detector detects an intruder at the boundary of the defined area.
A control method for a measurement apparatus that comprises a radiation source and a blocker able to block radiation, the measurement apparatus configured to measure thickness of an object to be measured using the radiation, the control method comprising:
- detecting an intruder at a boundary of a defined area that includes the radiation source;
- and
- closing the blocker to block the radiation when an intruder is detected at the boundary of the defined area.
Dependencies are inferred from the claim text.