Clean room facility

Abstract

Provided is a clean room facility where temperatures of a plurality of clean rooms can be set to appropriate levels while having a simple configuration. A clean room facility-includes a plurality of clean rooms having a first clean room and a second clean room, a chamber provided as a single common space above ceilings of the plurality of clean rooms, an air conditioner, a plurality of air supply fans, at least one air return fan, and a duct shaft for guiding air from the predetermined second clean room to the chamber. The second clean room is provided downstream of the first clean room in an air flow direction inside the chamber. An air flow path inside the chamber is narrowed upstream of the duct shaft.

Dependencies are inferred from the claim text.