Nanofabricated patterned mesoscopic circuits on diamond anvils
AssigneeWashington University
InventorsZackary Rehfuss, Kaiwen Zheng, Sheng Ran, Kater Murch
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AssigneeWashington University
InventorsZackary Rehfuss, Kaiwen Zheng, Sheng Ran, Kater Murch
Estimating the term…
A process for fabricating a mesoscopic circuit on a diamond surface for use in diamond anvil cell experiments is disclosed that includes mounting a diamond on a flat substrate to ensure a flat surface for fabricating the mesoscopic circuit; spin-coating the diamond surface with a bi-electron beam resist layer to form a bottom resist layer in direct contact with the diamond surface and a top resist layer over the bottom resist layer; depositing a metal layer over the bi-electron beam resist layer; removing a portion of the metal layer and bi-electron beam resist layer to expose a portion of the diamond surface in a pattern corresponding to one or more elements of the mesoscopic circuit; depositing electrically conductive layer(s) over the diamond surface and surrounding metal layer; and lifting off the unwanted portion of the at least one conductive layer, metal layer and resist layer to expose the mesoscopic circuit.
A process for fabricating a mesoscopic circuit on a diamond surface for use in diamond anvil cell (DAC) experiments, the process comprising:
A patterned diamond comprising a mesoscopic circuit formed on a diamond surface using a fabrication process comprising:
Dependencies are inferred from the claim text.