Maintenance system and maintenance method
AssigneeTokyo Electron Limited
InventorsGaku IKEDA, Shinsuke TAKAKI, Takuya MORI
Life of this patent
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Abstract
A maintenance system includes a rail, a working robot, and a self-propelled carriage. The rail is fixed on an outer side part of a substrate processing apparatus that has a processing unit, and extends in a vertical direction. The working robot is capable of being attached to or detached from the rail and is capable of being lifted or lowered along the rail. The self-propelled carriage transfers the working robot. The working robot includes an arm that is capable of going to an inside of the processing unit.
Claims11
A maintenance system, comprising:
- a rail that is fixed on an outer side part of a substrate processing apparatus that includes a processing unit, and that extends in a vertical direction;
- a working robot that is capable of being attached to or detached from the rail and that is capable of being lifted or lowered along the rail;
- and
- a self-propelled carriage that transfers the working robot, wherein
- the working robot includes an arm that is capable of going to an inside of the processing unit.
A maintenance system, comprising:
- a rail that is capable of being attached to or detached from a substrate processing apparatus that includes a processing unit, and that extends in a vertical direction;
- a working robot that is attached to the rail and that is capable of being lifted or lowered along the rail;
- and
- a self-propelled carriage that transfers the rail, wherein
- the working robot includes an arm that is capable of going to an inside of the processing unit.
A maintenance system, comprising:
- a working robot that includes an arm that is capable of going to an inside of a processing unit that is included in a substrate processing apparatus, and a gripping mechanism that grips a frame of the substrate processing apparatus;
- and
- a lifting/lowering mechanism that lifts or lowers the working robot in a vertical direction.
Dependencies are inferred from the claim text.