Laser processing apparatus and electronic device
AssigneeSamsung Display Co., Ltd.
InventorsKang Hyuk LEE, Hak Min KIM
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Abstract
A laser processing apparatus includes a laser unit irradicating a laser beam along a processing line of a target substrate to process the target substrate, a table including a panel table supporting the target substrate and a fume blocking wall surrounding the panel table, a cover including an opening overlapping the panel table and fume discharge slits overlapping a space between the panel table and the fume blocking wall, and a suction cup suctioning fume generated during processing of the target substrate and positioned between the cover and the laser unit. The suction cup includes a first suction hole at least partially overlapping an edge of the panel table, and a second suction hole overlapping at least one of the fume discharge slits.
Claims20
A laser processing apparatus comprising:
- a laser unit irradiating a laser beam along a processing line of a target substrate to process the target substrate;
- a table including a panel table supporting the target substrate and a fume blocking wall surrounding the panel table;
- a cover including an opening overlapping the panel table and fume discharge slits overlapping a space between the panel table and the fume blocking wall;
- and
- a suction cup suctioning fume generated during processing of the target substrate and positioned between the cover and the laser unit,
- wherein the suction cup includes a first suction hole at least partially overlapping an edge of the panel table, and a second suction hole overlapping at least one of the fume discharge slits.
An electronic device comprising:
- a processor;
- and
- a display panel manufactured using a laser processing apparatus,
- wherein the laser processing apparatus including:
- a laser unit irradiating a laser beam along a processing line of a target substrate to process the target substrate;
- a table including a panel table supporting the target substrate and a fume blocking wall surrounding the panel table;
- a cover including an opening overlapping the panel table and fume discharge slits overlapping a space between the panel table and the fume blocking wall;
- and
- a suction cup suctioning fume generated during processing of the target substrate and positioned between the cover and the laser unit, and
- wherein the suction cup includes a first suction hole at least partially overlapping an edge of the panel table, and a second suction hole overlapping at least one of the fume discharge slits.
Dependencies are inferred from the claim text.