Laser processing apparatus, method of manufacturing display device using the apparatus, and electronic device including display device manufactured using the method

A method of manufacturing a display device, the method comprising:

• providing a laser processing apparatus comprising a laser irradiation part which radiates solid laser beams, a homogenizer which homogenizes the solid laser beams, a first lens group which receives a light passed through the homogenizer and has a negative focal length of greater than about −1000 millimeters and less than about −300 millimeters, and a second lens group which receives a light passed through the first lens group and has a positive focal length of greater than about 100 millimeters and less than about 300 millimeters;
• forming a display substrate on a first surface of a carrier substrate;
• forming a light-emitting element on the display substrate;
• and
• peeling off the carrier substrate from the display substrate by radiating output light of the laser processing apparatus to a second surface, which is opposite to the first surface, of the carrier substrate using the laser processing apparatus,
• wherein an energy intensity of the output light has a super-Gaussian profile of greater than or equal to about 2.5 orders and less than or equal to about 7.5 orders.