Method for manufacturing a free standing membrane and method for forming an electroplated layer using a free standing membrane
AssigneeKorea Advanced Institute of Science and Technology
InventorsTaek-Soo Kim, Dong Jun Kim, Yonghwi Kim
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Abstract
A method for manufacturing a free-standing membrane may include transferring a membrane and growing a grain. In the transferring a membrane, a membrane may be transferred onto a first substrate provided with a penetration hole to provide a free-standing area in the membrane, the free-standing area overlapping with the penetration hole. In the growing a grain, a size of a grain in the free-standing area may be increased.
Claims10
A method for manufacturing a free-standing membrane, the method comprising:
- transferring a membrane onto a first substrate provided with a penetration hole to provide a free-standing area in the membrane, the free-standing area overlapping with the penetration hole in a planar view;
- and
- growing a grain to increase a size of the grain in the free-standing area.
A method for forming an electroplated layer using a free-standing membrane, the method comprising:
- transferring a membrane, in which a membrane is transferred onto a first substrate provided with a penetration hole to provide a free-standing area in a membrane, the free-standing area overlapping with the penetration hole in a planar view;
- growing a grain, in which a size of the grain in the free-standing area is increased by a heat treatment process;
- and
- electroplating, in which an electroplated layer is formed on the free-standing area after the heat treatment.
Dependencies are inferred from the claim text.