Ozone supply apparatus and ozone supply method

An ozone supply apparatus comprising:

• an ozone generator to generate ozonized gas containing ozone gas;
• an adsorption tower including an adsorbent that adsorbs the ozone gas contained in the ozonized gas;
• an ozone pipe to connect the ozone generator to the adsorption tower;
• a decompression circuit to suck the ozone gas desorbed from the adsorbent from inside of the adsorption tower through the ozone pipe, the decompression circuit including a decompression mechanism to discharge, from a discharge port, gas sucked from a suction port, a primary pipe to connect the suction port to the ozone pipe, and a secondary pipe connected to the discharge port;
• a dilution circuit to mix dilution air into the ozone gas flowing through the decompression circuit;
• a first flow meter installed in the decompression circuit;
• a second flow meter and a flow rate adjustment valve installed in the dilution circuit;
• a pressure gauge installed in the adsorption tower;
• and
• a processor to execute a program;
• and
• a memory to store the program which, when executed by the processor performs processes of,
• estimating an ozone concentration of the ozone gas discharged by the decompression mechanism to the secondary pipe, based on a measurement value of each of the first flow meter, the second flow meter, and the pressure gauge and adjusting an opening degree of the flow rate adjustment valve such that an estimated value of the ozone concentration of the ozone gas discharged from the decompression mechanism to the secondary pipe becomes a preset target value.