Pick-and-place tool and process of using the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTZU JUNG TIEN, JEN-YUAN CHANG
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Abstract
A pick-and-place tool is provided. The pick-and-place tool includes a gantry, a moving arm and a plurality of extending arms. The moving arm is horizontally-movably attached to the gantry. The plurality of extending arms extend from a bottom of the moving arm. Each of the plurality of extending arms comprises a telescopic shaft and a bond head. The telescopic shaft extends from the bottom of the moving arm and is horizontally movable and vertically retractable. The bond head extends from a bottom end of the telescopic shaft.
Claims20
A process for picking and placing device dies, comprising:
- collecting and flipping a plurality of device dies;
- picking up the plurality of device dies using a pick-and-place tool, wherein the pick-and-place tool comprises a gantry, a moving arm movably mounted on the gantry, and a plurality of extending arms extending from a bottom of the moving arm, so that each of the plurality of extending arms pick up one of the plurality of device dies;
- horizontally moving the plurality of device dies to face a substrate by horizontally moving the moving arm along the gantry;
- horizontally moving a telescopic shaft of each of the plurality of extending arms to align each of the plurality of device dies with a predetermined position on the substrate;
- and
- vertically moving the telescopic shaft of each of the plurality of extending arms toward the predetermined position to bond the plurality of device dies onto the substrate.
A process for picking and placing device dies, comprising:
- collecting and flipping a plurality of device dies;
- picking up the plurality of device dies synchronously using a pick-and-place tool;
- and
- placing the plurality of device dies onto a substrate using the pick-and-place tool.
A pick-and-place tool, comprising:
- a gantry;
- a moving arm horizontally-movably attached to the gantry;
- and
- a plurality of extending arms extending from a bottom of the moving arm and each of the plurality of extending arms comprising:
- a telescopic shaft extended from the bottom of the moving arm and being horizontally movable and vertically retractable;
- and
- a bond head extending from a bottom end of the telescopic shaft.
Dependencies are inferred from the claim text.