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US 2026/0231801 A1Published application
Semiconductor structure and method for manufacturing same
AssigneeMitsui Chemicals, Inc.
InventorsYasuhisa KAYABA, Satoshi INADA, Kahori TAMURA
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Abstract
Provided is a semiconductor structure including: an organic bonding layer that includes an organic insulating layer and a metal pad; plural silicon dies that are arranged in a two-dimensional manner on the organic bonding layer and hybrid-bonded thereto; and a resin mold layer that is filled between the plural silicon dies on the organic bonding layer.
Claims22
A semiconductor structure, comprising:
- an organic bonding layer that comprises an organic insulating layer and a metal pad;
- a plurality of silicon dies that are arranged in a two-dimensional manner on the organic bonding layer and hybrid-bonded to the organic bonding layer;
- and
- a resin mold layer that is filled between the plurality of silicon dies on the organic bonding layer.
1 more element
(canceled)
A method of manufacturing a semiconductor structure, comprising:
- (A)
- forming a redistribution layer on a temporary fixing substrate;
- forming an organic bonding layer, which comprises an organic insulating layer and a metal pad, on the redistribution layer that is temporarily fixed on the temporary fixing substrate;
- arranging a plurality of silicon dies in a two-dimensional manner on the organic bonding layer formed on the redistribution layer and hybrid-bonding the silicon dies to the organic bonding layer;
- forming a resin mold layer that is filled between the plurality of silicon dies on the organic bonding layer and that covers upper surfaces of the plurality of silicon dies;
- and
- removing the temporary fixing substrate;
- or
- (B)
- forming an organic bonding layer, which comprises an organic insulating layer and a metal pad, on a temporary fixing substrate;
- arranging a plurality of silicon dies in a two-dimensional manner on the organic bonding layer formed on the temporary fixing substrate and hybrid-bonding the silicon dies to the organic bonding layer;
- forming a resin mold layer that is filled between the plurality of silicon dies on the organic bonding layer and that covers upper surfaces of the plurality of silicon dies;
- and
- removing the temporary fixing substrate;
- or
- (C)
- forming a high-density wiring layer on a build-up substrate;
- forming an organic bonding layer, which comprises an organic insulating layer and a metal pad, on the high-density wiring layer;
- arranging a plurality of silicon dies in a two-dimensional manner on the organic bonding layer formed on the high-density wiring layer and hybrid-bonding the silicon dies to the organic bonding layer;
- and
- forming a resin mold layer that is filled between the plurality of silicon dies on the organic bonding layer and that covers upper surfaces of the plurality of silicon dies.
18 more elements
(canceled)
(canceled)
Dependencies are inferred from the claim text.