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US 2026/0231664 A1Published application
Thin-film-forming apparatus and electronic device manufactured thereby
AssigneeSamsung Display Co., Ltd.
InventorsJin Won BAEK, Yeong Jun KIM, Lae Ho KIM, Bong Sik NOH, Tae Ho LEE, Myung Soo HUH, Dong Hoon HYUN
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Abstract
A thin-film-forming apparatus includes an electrostatic chuck for supporting a substrate, and including a base portion, electrode patterns on the base portion, and ground patterns on the base portion and spaced apart from the electrode patterns, a supply nozzle for supplying a chemical onto the substrate, and a power supply for supplying power to the electrostatic chuck, and for selectively supplying power to one of the electrode patterns.
Claims20
A thin-film-forming apparatus comprising:
- an electrostatic chuck for supporting a substrate, and comprising:
- a base portion;
- electrode patterns on the base portion;
- and
- ground patterns on the base portion and spaced apart from the electrode patterns;
- a supply nozzle for supplying a chemical onto the substrate;
- and
- a power supply for supplying power to the electrostatic chuck, and for selectively supplying power to one of the electrode patterns.
5 more elements
An electronic device comprising:
- a display device manufactured by a thin-film-forming apparatus comprising:
- an electrostatic chuck for supporting a substrate, and comprising:
- a base portion;
- electrode patterns on the base portion;
- and
- ground patterns on the base portion and spaced apart from the electrode patterns;
- a supply nozzle for supplying a chemical onto the substrate;
- and
- a power supply for supplying power to the electrostatic chuck, and for selectively supplying power to one of the electrode patterns.
6 more elements
Dependencies are inferred from the claim text.