Display apparatus, method of manufacturing display apparatus and electronic device including display apparatus

A method comprising:

• forming a semiconductor layer and a first insulating layer on the semiconductor layer on a substrate, wherein the first insulating layer comprises a first through hole exposing a top surface of the semiconductor layer;
• forming a first metal layer, wherein the first metal layer comprises a first portion covering an inner side surface of the first through hole and the top surface of the semiconductor layer, and a second portion covering a top surface of the first insulating layer;
• forming a selection layer, wherein the selection layer comprises a first region covering the first portion and a second region covering the second portion;
• removing the first region of the selection layer;
• forming a self-assembled monolayer on the second region of the selection layer;
• forming a filling material in a groove defined by the second region;
• removing the self-assembled monolayer and at least a portion of the second region;
• and
• forming a second metal layer on the first metal layer and the filling material,
• wherein the method is a method of manufacturing a display apparatus.