Semiconductor optical amplifier
AssigneeInnolume GmbH
InventorsSergei Poltavtsev, Alexey Gubenko, Artem Petrenko, Aleksei Borodkin
Life of this patent
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Abstract
According to an embodiment, a semiconductor optical amplifier comprises: an optical input; an optical output; a waveguide optically coupled to the optical input and to the optical output, wherein the waveguide comprises at least two bent sections; and a plurality of semiconductor layers epitaxially deposited on a substrate, wherein the waveguide is positioned on top of the plurality of semiconductor layers and the plurality of semiconductor layers comprises an active region configured to amplify an optical signal propagating in the at least one waveguide.
Claims16
A semiconductor optical amplifier comprising:
- an optical input;
- an optical output;
- a waveguide optically coupled to the optical input and to the optical output, wherein the waveguide comprises at least two bent sections;
- and
- a plurality of semiconductor layers epitaxially deposited on a substrate, wherein the waveguide is positioned on top of the plurality of semiconductor layers and the plurality of semiconductor layers comprises an active region configured to amplify an optical signal propagating in the waveguide;
- wherein the plurality of semiconductor layers further comprises a bottom cladding layer and a top cladding layer, wherein a refractive index of the active region is greater than a refractive index of the bottom cladding layer and a refractive index of the top cladding layer.
A method for forming at least one waveguide, the method comprising:
- providing a semiconductor stack comprising a plurality of semiconductor layers epitaxially deposited on a substrate;
- forming a stop layer onto the semiconductor stack;
- forming an aluminum-rich layer onto the stop layer;
- forming at least one waveguide by etching the aluminum-rich layer, wherein the at least one waveguide comprises at least two bent sections;
- wherein the plurality of semiconductor layers comprises an active region configured to amplify an optical signal propagating in the at least one waveguide.
Dependencies are inferred from the claim text.