Uniform Deposition of Silicon in Pores of Porous Conductive Particles for Battery Anodes

Abstract

A method of producing a solid powder mass, including (a) placing multiple conductive porous particles in a deposition zone of a reaction apparatus, equipped with a particle-moving device that mobilizes the porous particles around inside the deposition zone; (b) providing a stream of silicon halide vapor phase and directing the vapor phase to flow into the deposition zone, wherein the silicon halide is selected from SiF4, SiCl4, SiI4, SiI2, SiBr4, SiXaZb, or a combination thereof, wherein X and Z are each a halogen element, and a=1-3, b=1-3, and a +b=4; and (c) activating the particle-moving device and exposing the silicon halide vapor to a decomposition temperature to convert the silicon halide vapor into a halogen gas and Si atoms, allowing Si atoms to infiltrate into the pores of the porous particles and deposit therein as solid Si coatings, particles, and/or nanowires (SiNW).

Dependencies are inferred from the claim text.