Apparatus for Uniform Deposition of Silicon in Pores of Porous Conductive Particles for Battery Anodes

An apparatus for production of a solid powder mass of multiple porous particulates having pores containing silicon coatings, particles, and/or nanowires (SiNW) therein for use as an anode active material of a lithium-ion or sodium-ion battery, said apparatus comprising:

• (A) a vaporization chamber or zone equipped with a heating device for vaporizing a silicon halide source to generate a silicon halide vapor or keeping a silicon halide vapor above its boiling point;
• (B) a thermal decomposition chamber or zone equipped with a heating device for thermally decomposing the silicon halide vapor into Si atoms and halogen;
• (C) a deposition chamber or zone, for receiving Si atoms and for holding multiple porous particles, and a heating device for heating said deposition chamber or zone and the multiple porous particles disposed therein to facilitate deposition of Si atoms in the pores of the multiple porous particles;
• and
• (D) a particle-moving device for mobilizing said multiple porous particles to move around in the deposition chamber or zone to facilitate uniform infiltration and deposition of said Si atoms in pores of said porous particles to form silicon coatings, particles, and/or nanowires (SiNW) therein.