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US 2026/0229467 A1Published application
Carrier ring for floating tcp chamber gas plate
AssigneeLam Research Corporation
InventorsGordon PENG, Ambarish CHHATRE, Craig ROSSLEE, Dan MAROHL, David SETTON
Life of this patent
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Abstract
A carrier ring includes an annular body, a radially inward projecting portion of the annular body, and a groove defined in an outer perimeter of the annular body. The radially inward projecting portion has a first inner diameter and projects radially inward from a second inner diameter of the annular body. The second inner diameter is greater than the first inner diameter. The radially inward projecting portion defines a ledge.
Claims10
A carrier ring comprising:
- an annular body;
- a radially inward projecting portion of the annular body, the radially inward projecting portion having a first inner diameter and projecting radially inward from a second inner diameter of the annular body, the second inner diameter being greater than the first inner diameter, the radially inward projecting portion defining a ledge;
- and a groove defined in an outer perimeter of the annular body.
Dependencies are inferred from the claim text.