US 2026/0229462 A1 · SYSTEMS AND METHODS FOR CONTROLLING FAST ACTUATORS IN AN IMPEDANCE MATCHING UNIT

Abstract

Systems and methods for controlling fast actuators in an impedance matching unit are described. The impedance matching unit includes an input port coupled to a radio frequency (RF) generator. The impedance matching unit further includes an output port coupled to a plasma chamber. The impedance matching unit includes a connection point located between the input port and the output port, a first reactive element coupled between the input port and the connection point, and a first switch coupled in parallel to the first reactive element. The impedance matching unit includes a second reactive element coupled between the connection point and the output port, and includes a second switch coupled in parallel to the second reactive element.

Claims25

Dependent claims

An impedance matching unit comprising:

an input port configured to be coupled to a radio frequency (RF) generator;
an output port configured to be coupled to a plasma chamber;
a connection point located between the input port and the output port;
a first reactive element coupled between the input port and the connection point;
a first switch coupled in parallel to the first reactive element;
a second reactive element coupled between the connection point and the output port;
and
a second switch coupled in parallel to the second reactive element,
wherein the first and second switches are configured to operate to tune a reactance of the impedance matching unit.

6 more elements

Dependencies are inferred from the claim text.

Systems and methods for controlling fast actuators in an impedance matching unit

Life of this patent

Systems and methods for controlling fast actuators in an impedance matching unit

Life of this patent

Abstract

Claims25