Multi-charged particle beam writing method, and non-transitory computer-readable storage medium storing a program

A non-transitory computer-readable storage medium storing a program for causing a computer to execute processing, comprising:

• generating bitmap data defining values each depending on a dose of each pixel of a plurality of pixels, for each of a plurality of writing regions, on a target object, each of which is composed of meshed-divided regions being the plurality of pixels and which are offset from each other by a size equal to or smaller than a size of the each pixel;
• storing a plurality of bitmap data having been generated in a storage device;
• and
• reading the plurality of bitmap data from the storage device, and controlling, based on two or more bitmap data in the plurality of bitmap data, a writing mechanism to perform writing to pixels each being in a different one of writing regions each corresponding to one of the two or more bitmap data with a plurality of shots of a same beam in multiple charged particle beams during one tracking control, while repeating a cycle of resetting a deflection amount after each tracking control for deflecting the multiple charged particle beams in order to follow a movement of a stage on which the target object is placed.