Multi-charged particle beam writing apparatus, data generation apparatus, complexity calculation apparatus, multi-charged particle beam writing method and data generation method

A data generation apparatus for generating writing data used by a multi-charged particle beam writing apparatus, the data generation apparatus comprising:

• a complexity calculator configured to calculate complexity of a figure included in design data;
• a determiner configured to determine whether the complexity satisfies a threshold value condition;
• a divider configured, when the complexity satisfies the threshold value condition, to not divide the figure, and when the complexity does not satisfy the threshold value condition, to monotonically divide the figure in a predetermined direction until the complexity satisfies the threshold value condition;
• and
• an output unit configured to generate and output the writing data using the figure satisfying the threshold value condition.

A multi-charged particle beam writing method comprising:

• calculating complexity of a figure included in design data;
• when the complexity satisfies the threshold value condition, not dividing the figure, and when the complexity does not satisfy the threshold value condition, monotonically dividing the figure in a predetermined direction until the complexity satisfies the threshold value condition, and generating writing data using the figure satisfying the threshold value condition;
• and
• forming a multi-beam composed of a plurality of charged particle beams, controlling, based on the writing data, a writer that individually turns ON/OFF a corresponding one of beams in the multi-beam, and irradiating the charged particle beams onto a target object to write a pattern.

A data generation method for generating writing data used by a multi-charged particle beam writing apparatus, the data generation method comprising:

• calculating complexity of a figure included in design data;
• determining whether the complexity satisfies a threshold value condition;
• when the complexity satisfies the threshold value condition, not dividing the figure, and when the complexity does not satisfy the threshold value condition, monotonically dividing the figure in a predetermined direction until the complexity satisfies the threshold value condition;
• and
• generating the writing data using the figure satisfying the threshold value condition.