Apparatus for contamination reduction in charged particle beam systems
AssigneeASML Netherlands B.V.
InventorsYinglong LI, Shao-Wei FU
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Abstract
Systems and apparatuses may include a component of a sample holder of a charged particle system, the component comprising a body portion comprising a noble metal; a coating layer covering at least a portion of an outer surface area of the body portion, wherein the coating layer is configured to reduce particles of the noble metal from being removed from the body portion to mitigate contaminants in the charged particle system.
Claims15
A component of a sample holder of a charged particle system, the component comprising:
- a body portion comprising a noble metal;
- and
- a coating layer covering at least a portion of an outer surface area of the body portion,
- wherein the coating layer is configured to reduce particles of the noble metal from being removed from the body portion to mitigate contaminants in the charged particle system.
A component of a sample holder of a charged particle system, the component comprising:
- a first layer comprising a noble metal;
- and
- a second layer on the first layer,
- wherein the second layer is configured to reduce particles of the noble metal from being removed from the first layer to mitigate contaminants in the charged particle system.
A sample holder configured to hold a wafer, the sample holder comprising:
- a plurality of components, wherein each component of the plurality of components comprises:
- a body portion comprising a noble metal;
- and
- a coating layer covering at least a portion of an outer surface area of the body portion,
- wherein the coating layer is configured to reduce particles of the noble metal from being removed from the body portion to mitigate contaminants in a charged particle system.
A charged particle system comprising:
- a sample holder configured to hold a wafer,
- wherein the sample holder comprises a plurality of components, each component of the plurality of components comprising:
- a body portion comprising a noble metal;
- and
- a coating layer covering at least a portion of an outer surface area of the body portion,
- wherein the coating layer is configured to reduce particles of the noble metal from being removed from the body portion to mitigate contaminants in the charged particle system.
Dependencies are inferred from the claim text.