Insulator, Insulator-Equipped Charged Particle Gun, Insulator-Equipped Charged Particle Beam Device, and Insulator Manufacturing Method

An insulator comprising:

• an insulation member;
• a first electrode and a second electrode that are provided on the insulation member;
• and
• a metal film that is provided on a surface of the insulation member, wherein
• the metal film includes, between the first electrode and the second electrode, one or more first regions with surface resistance of 1012 Ω/sq to 1015 Ω/sq, and one or more second regions with surface resistance smaller than the surface resistance of the first regions, and
• the first region and the second region are alternately provided along a direction from the first electrode toward the second electrode.

A method for producing an insulator, the method comprising:

• preparing an insulation member;
• providing a first electrode and a second electrode on the insulation member;
• and
• alternately providing one or more first regions with surface resistance of 1012 Ω/sq to 1015 Ω/sq and one or more second regions with surface resistance smaller than the surface resistance of the first regions along a direction from the first electrode to the second electrode.