High voltage resistive conductor cable for operation under vacuum conditions
AssigneeApplied Materials Israel Ltd.
InventorsAnton Tsyganok, Yosef Basson, Ittamar Levy
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Abstract
There is provided a high voltage (HV) resistive conductor cable for operation under vacuum conditions, the cable including a resistive conductor core coated with an insulating material configured to prevent leakage of contaminants when operating under vacuum conditions, wherein said resistive conductor core includes glassy fibers and conductive carbon, wherein the conductive carbon is about 2-25 % (w/w) of the resistive conductor core, such that the resistive conductor core is characterized by having an electric resistance of about 1-500 kΩ/m and by being configured to withstand a temperature of at least about 250° C.
Claims17
A high voltage (HV) resistive conductor cable for operation under vacuum conditions, the cable comprising a resistive conductor core coated with an insulating material configured to prevent leakage of contaminants when operating under vacuum conditions, wherein said resistive conductor core comprises glassy fibers and conductive carbon, wherein the conductive carbon is about 2-25% (w/w) of the resistive conductor core, such that the resistive conductor core is characterized by having an electric resistance of about 1-500 kΩ/m and by being configured to withstand a temperature of at least about 250 ° C.
17-20. (canceled)
Dependencies are inferred from the claim text.