Machine vision-based showerhead inspection
AssigneeLam Research Corporation
InventorsDebotosh PODDAR, Vineeth PARASHIVAMURTHY, Karthik Adappa SATHISH
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Abstract
Examples are disclosed related to machine-vision based showerhead inspection systems and methods. One example provides a computing system for a machine vision-based inspection of a showerhead, the computing system comprising a processor and memory. The processor is configured to execute a program using portions of the memory to receive image data of the showerhead, identify a feature of interest in the image data of the showerhead, generate a cropped image based on the identified feature of interest using the image data of the showerhead, generate an upscaled image by upscaling the cropped image, and perform one or more measurement on the upscaled image.
Claims20
A computing system for a machine vision-based inspection of a showerhead, the computing system comprising:
- a processor and memory, the processor configured to execute a program using portions of the memory to:
- receive image data of the showerhead;
- identify a feature of interest in the image data of the showerhead;
- generate a cropped image based on the identified feature of interest using the image data of the showerhead;
- generate an upscaled image by upscaling the cropped image;
- and
- perform one or more measurements on the upscaled image.
A method for machine vision-based inspection of a showerhead, the method comprising:
- receiving image data of the showerhead;
- identifying a feature of interest in the image data of the showerhead;
- generating a plurality of cropped images based on the identified feature of interest using the image data of the showerhead;
- generating a plurality of upscaled images by upscaling the plurality of cropped images;
- and
- performing measurements on the plurality of upscaled images.
A showerhead inspection system for a machine vision-based inspection of a showerhead, the showerhead inspection system comprising:
- a camera system comprising:
- a camera;
- a front lighting system;
- and
- a stage for seating the showerhead;
- a computing system;
- and
- a controller configured to:
- control the camera system to acquire image data of the showerhead;
- and
- control the computing system to:
- receive the image data of the showerhead from the camera system;
- identify a feature of interest in the image data of the showerhead;
- generate a plurality of cropped images based on the identified feature of interest using the image data of the showerhead;
- generate a plurality of upscaled images by upscaling the plurality of cropped images;
- and
- perform measurements on the plurality of upscaled images.
Dependencies are inferred from the claim text.