Maintenance method and maintenance system for a laser optics system

Abstract

A maintenance method for detecting soilings on a laser optics system of a laser beam system, the method including producing a speckle image with a multiplicity of speckles on a speckle image blank, wherein the speckle image is formed by irradiating a light-sensitive surface of the speckle image blank with a laser beam passing through the laser optics system. The method includes evaluating the speckle image, by determining at least one speckle geometry of at least one of the multiplicity of speckles and comparing the at least one determined speckle geometry with at least one stored characteristic speckle geometry. A soiling of the laser optics system is detected when a predetermined similarity or agreement of the determined speckle geometry with the at least one stored characteristic speckle geometry is found. The method includes outputting soiling information. The soiling information includes at least a number of detected soilings.

Dependencies are inferred from the claim text.