Process variability simulator for manufacturing processes
AssigneeNanotronics Imaging, Inc.
InventorsJohn B. Putman, Matthew C. Putman, Joanna Lee, Sarah Constantin, Damas Limoge
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AssigneeNanotronics Imaging, Inc.
InventorsJohn B. Putman, Matthew C. Putman, Joanna Lee, Sarah Constantin, Damas Limoge
Estimating the term…
A computing system receives one or more process parameters to be optimized during a multi-step manufacturing process. The computing system initiates a process prediction model in accordance with the one or more process parameters. The computing system simulates the multi-step manufacturing process using a plurality of sets of different setpoints until the one or more process parameters are optimized. The computing system identifies a first set of setpoints from the plurality of sets of different setpoints that optimized the one or more process parameters. The computing system causes the station controller to apply the first set of setpoints to the one or more stations.
A manufacturing system, comprising:
A method of optimizing process parameters in a multi-step manufacturing process, comprising:
A non-transitory computer-readable medium storing instructions that, when executed by a processor, cause a computing system to perform operations comprising:
Dependencies are inferred from the claim text.