Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium

A substrate processing apparatus comprising:

• at least one processing mechanism that processes a substrate;
• a controller that receives a signal of at least one selected from the group of a P wave (initial tremor wave) and an S wave (principal fluctuation wave), and that is capable of controlling the at least one processing mechanism according to the received signal,
• wherein the controller:
• stores setting information that sets a stopping method for the at least one processing mechanism selected from the group of stopping operations including an operation of continuing processing of the substrate according to the signal;
• performs the stopping method that has been set in response to the signal;
• and
• when the stopping method that has been set is the operation of continuing processing of the substrate, continuously performs a substrate processing process of the at least one processing mechanism in a case where the signal is detected during the substrate processing process of the at least one processing mechanism.

A non-transitory computer-readable recording medium storing a program that causes a controller to perform a process, wherein the program is executed in a substrate processing apparatus including at least one processing mechanism that processes a substrate, the controller that receives a signal of at least one selected from the group of a P wave (initial tremor wave) and an S wave (principal fluctuation wave) of an earthquake by an earthquake detector, and that is capable of controlling the at least one processing mechanism according to the received signal, the process comprising:

• (a) a substrate processing process of operating at least one processing mechanism to process a substrate;
• (b) storing setting information that sets a stopping method for the at least one processing mechanism selected from the group of stopping operations including an operation of continuing processing of the substrate according to the signal;
• (c) performing the stopping method that has been set in response to receiving the signal,
• wherein in (c), when first stopping method that has been set is the operation of continuing processing of the substrate, the at least one processing mechanism continuously performs the substrate processing process in a case where the signal is received during the substrate processing process of the at least one processing mechanism.