Inspection Management System and Method

An inspection management method for an inspection management system to manage an inspection of a sample performed by an inspection system that inspects the sample, wherein

• the inspection performed by the inspection system is implemented as an inspection processing sequence in which first processing, second processing, and third processing are sequentially performed by a first type device, a second type device, and a third type device that are devices for performing different kinds of processing,
• the inspection system is configured to perform the inspection processing sequence including producing a thin piece from the sample at each site that is a target location of the inspection, transferring the thin piece to a carrier, and performing processing related to the inspection for each of the thin pieces on the carrier, and
• the inspection management system is configured to create instruction information including an instruction of an order of transfer and the transfer destination carrier for a processing operation of taking out the plurality of thin pieces from a plurality of the sites of a plurality of the samples and transferring the thin pieces to a plurality of the carriers, which is instruction information related to a processing operation of the inspection processing sequence of the inspection system.