Inspection Management System and Method

An inspection management system for managing inspection of a sample by an inspection system that inspects the sample, wherein

• the inspection in the inspection system is implemented as an inspection processing sequence in which first processing, second processing, and third processing are sequentially performed by a first type device, a second type device, and a third type device, respectively, which are devices that perform different kinds of processing,
• the first type device, the second type device, and the third type device each include one or more devices,
• as the inspection processing sequence, the inspection system produces a thin piece from the sample at each target portion of the inspection, transfers the thin piece to a carrier, and performs processing related to the inspection for each of the thin pieces on the carrier,
• the inspection management system
• is connected to each of a plurality of devices including the first type device, the second type device, and the third type device through communication,
• grasps a device status including an idle time and a usage time of each of the devices based on communication with each of the devices, and
• based on an inspection instruction related to the inspection and the device status, selects, from the plurality of devices, the devices respectively serving as the first type device, the second type device, and the third type device to be used in the inspection processing sequence and a time to be used for the devices, and creates a plan of the inspection processing sequence including the selected devices and time,
• the inspection management system executes the inspection processing sequence of the inspection by the inspection system based on the plan,
• the first type device performs a processing operation of forming the thin piece on the sample,
• the first type device or the second type device performs a processing operation of taking out the thin piece formed on the sample and transferring the thin piece to the carrier,
• the third type device performs a processing operation of observing the thin piece mounted on the carrier,
• the inspection management system holds performance information of a result of the inspection processing sequence executed based on the plan, and
• creates the plan of a new inspection based on the performance information,
• the inspection management system calculates a success rate of a processing operation for each of the devices based on the result of the inspection processing sequence executed based on the plan, and
• creates the plan of a new inspection based on the success rate,
• the first type device or the second type device monitors a status of a processing operation of transferring the thin piece to the carrier, and
• the inspection management system calculates a success rate of the processing operation of transferring the thin piece to the carrier by the first type device or the second type device based on the monitoring.

An inspection management method executed by an inspection management system for managing inspection of a sample by an inspection system that inspects the sample, wherein

• the inspection in the inspection system is implemented as an inspection processing sequence in which first processing, second processing, and third processing are sequentially performed by a first type device, a second type device, and a third type device, respectively, which are devices that perform different kinds of processing,
• the first type device, the second type device, and the third type device each include one or more devices,
• as the inspection processing sequence, the inspection system produces a thin piece from the sample at each target portion of the inspection, transfers the thin piece to a carrier, and performs processing related to the inspection for each of the thin pieces on the carrier,
• the inspection management system is connected to each of a plurality of devices including the first type device, the second type device, and the third type device through communication,
• the inspection management method comprises:
• the inspection management system grasping a device status including an idle time and a usage time of each of the devices based on communication with each of the devices;
• based on an inspection instruction related to the inspection and the device status, the inspection management system selecting, from the plurality of devices, devices respectively serving as the first type device, the second type device, and the third type device to be used in the inspection processing sequence and a time to be used for the devices, and creating a plan of the inspection processing sequence including the selected devices and time;
• and
• the inspection management system executing the inspection processing sequence of the inspection by the inspection system based on the plan,
• the first type device performs a processing operation of forming the thin piece on the sample,
• the first type device or the second type device performs a processing operation of taking out the thin piece formed on the sample and transferring the thin piece to the carrier,
• the third type device performs a processing operation of observing the thin piece mounted on the carrier,
• the inspection management system holds performance information of a result of the inspection processing sequence executed based on the plan, and
• creates the plan of a new inspection based on the performance information,
• the inspection management system calculates a success rate of a processing operation for each of the devices based on the result of the inspection processing sequence executed based on the plan, and
• creates the plan of a new inspection based on the success rate,
• the first type device or the second type device monitors a status of a processing operation of transferring the thin piece to the carrier, and
• the inspection management system calculates a success rate of the processing operation of transferring the thin piece to the carrier by the first type device or the second type device based on the monitoring.

An inspection management system for managing inspection of a sample by an inspection system that inspects the sample, wherein

• the inspection in the inspection system is implemented as an inspection processing sequence in which first processing, second processing, and third processing are sequentially performed by a first type device, a second type device, and a third type device, respectively, which are devices that perform different kinds of processing,
• the first type device, the second type device, and the third type device each include one or more devices,
• as the inspection processing sequence, the inspection system produces a thin piece from the sample at each target portion of the inspection, transfers the thin piece to a carrier, and performs processing related to the inspection for each of the thin pieces on the carrier,
• the inspection management system
• is connected to each of a plurality of devices including the first type device, the second type device, and the third type device through communication,
• grasps a device status including an idle time and a usage time of each of the devices based on communication with each of the devices, and
• based on an inspection instruction related to the inspection and the device status, selects, from the plurality of devices, devices respectively serving as the first type device, the second type device, and the third type device to be used in the inspection processing sequence and a time to be used for the devices, and creates a plan of the inspection processing sequence including the selected devices and time,
• the inspection management system executes the inspection processing sequence of the inspection by the inspection system based on the plan,
• the first type device performs a processing operation of forming the thin piece on the sample,
• the first type device or the second type device performs a processing operation of taking out the thin piece formed on the sample and transferring the thin piece to the carrier,
• the third type device performs a processing operation of observing the thin piece mounted on the carrier,
• the inspection management system holds performance information of a result of the inspection processing sequence executed based on the plan, and
• creates the plan of a new inspection based on the performance information,
• the inspection management system calculates an index value of a processing time or a processing capacity for each of the devices based on the result of the inspection processing sequence executed based on the plan, and
• creates the plan of a new inspection based on the index value,
• the first type device or the second type device monitors a status of a processing operation of transferring the thin piece to the carrier, and
• the inspection management system calculates the index value of the processing time or the processing capacity of the processing operation of transferring the thin piece to the carrier by the first type device or the second type device based on the monitoring.