Estimation method, control method and control device
AssigneeSCREEN Holdings Co., Ltd.
InventorKenji NAKANISHI
Life of this patent
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AssigneeSCREEN Holdings Co., Ltd.
InventorKenji NAKANISHI
Estimating the term…
An imaging system to irradiate a base material with laser is subjected to a step of acquiring temperature distribution data representing a temperature distribution at the imaging system, an estimation step of inputting the temperature distribution data to a learned model and acquiring an estimated exposure result that is an estimation of an exposure result output from the learned model, and a distortion amount calculation step of calculating a distortion amount of a laser irradiation position from the estimated exposure result. This allows a distortion amount of a laser irradiation position to be estimated in a short time. Thus, it is possible to align laser in a short time. As a result, deviation of a laser irradiation position can be reduced in a shorter time than calibration and an interval during the calibration can be expanded.
An estimation method of estimating a distortion amount of a laser irradiation position in an imaging system to irradiate a base material with laser, comprising:
A control device for an imaging system to irradiate a base material with laser, comprising:
An estimation method of estimating a distortion amount of a laser irradiation position in an imaging system to irradiate a base material with laser, comprising:
A control device for an imaging system to irradiate a base material with laser, comprising:
Dependencies are inferred from the claim text.