Resist composition, resist pattern formation method, compound, and acid generator
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorYohei Adachi
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorYohei Adachi
Estimating the term…
A resist composition including a compound represented by General Formula (b0). In Formula (b0), Z is a cyclic group including a heterocyclic ring including at least a carbon atom and a nitrogen atom; Xb0 is an iodine atom or a bromine atom; nxb0 is an integer of 1 or greater; Rb0 is a substituent; nrb0 is an integer of 0 or greater; Yb00 is a linking group or a single bond; nz0 is an integer of 1 or greater; Yb01 is a divalent linking group or a single bond when nz0 is 1; Yb01 is an (nz0+1)-valent linking group in when nz0 is 2 or greater; Yb02 is a divalent linking group when Yb01 is a single bond; Yb02 is a divalent linking group or a single bond when Yb01 is not a single bond; Vb0 is an alkylene group, a fluorinated alkylene group, or a single bond; and R0 is a fluorinated alkyl group, a fluorine atom, or a hydrogen atom; and Mm+ represents an organic cation.
A resist composition which generates an acid upon light exposure and whose solubility in a developing solution is changed by an action of the acid, the resist composition comprising:
A compound represented by General Formula (b0),
Dependencies are inferred from the claim text.