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US 2026/0227574 A1Published application
Mach-zehnder interferometers having folded delay arms
AssigneeGlobalFoundries U.S. Inc.
InventorsAneesh Dash, Michal Rakowski
Life of this patent
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Abstract
Structures for a Mach-Zehnder interferometer and methods of forming a structure for a Mach-Zehnder interferometer. The structure comprises a Mach-Zehnder interferometer including a first directional coupler, a second directional coupler, a first delay arm between the first and second directional couplers, and a second delay arm between the first and second directional couplers. The first delay arm includes a portion with a U-shape that surrounds a pocket, and the second delay arm includes a portion with a U-shape that extends into the pocket.
Claims20
A structure comprising:
- a first Mach-Zehnder interferometer including a first directional coupler, a second directional coupler, a first delay arm between the first directional coupler and the second directional coupler, and a second delay arm between the first directional coupler and the second directional coupler, the first delay arm including a portion with a U-shape that surrounds a first pocket, and the second delay arm including a portion with a U-shape that extends into the first pocket.
A method comprising:
- forming a Mach-Zehnder interferometer including a first directional coupler, a second directional coupler, a first delay arm between the first directional coupler to the second directional coupler, and a second delay arm between the first directional coupler and the second directional coupler,
- wherein the first delay arm includes a portion with a U-shape that surrounds a pocket, and the second delay arm includes a portion with a U-shape that extends into the pocket.
Dependencies are inferred from the claim text.