Long-wave infrared phase modulation and polarization ellipticity standard

A method, comprising:

• disposing an insulator layer on a polar dielectric substrate;
• disposing a resist on the insulator layer disposed on the polar dielectric substrate, the polar dielectric substrate having a phonon polariton surface contacting the insulator layer;
• patterning the resist to form an inverse pattern of a grating;
• depositing a metal-containing material of the grating in spaces of the inverse pattern of the resist;
• and
• removing the resist to form the grating comprising a plurality of grating structures on a plasmon polariton surface of the insulator layer, adjacent grating structures of the plurality of grating structures forming gaps therebetween, the insulator layer is exposed in each of the gaps.

A system, comprising:

• an an array of devices, each device comprising:
• a polar dielectric substrate;
• an insulator layer disposed on the polar dielectric substrate, the polar dielectric substrate having a phonon polariton surface contacting the insulator layer;
• and
• a grating comprising a plurality of grating structures disposed on a plasmon polariton surface of the insulator layer, adjacent grating structures of the plurality of grating structures forming gaps.