Detector, Measurement Device, and Charged Particle Beam Apparatus

Abstract

The detector includes a light emitting element configured to emit light due to collision of a quantum emitted from a sample by irradiating the sample with a beam, and a plurality of light receiving elements each configured to receive light generated by the light emitting element on a light receiving surface. The light receiving surface is disposed at a position farther from the beam than the light emitting element in a first direction intersecting an irradiation direction of the beam, the light receiving surface is disposed in a direction intersecting the irradiation direction of the beam, and the detector forms a first optical path that guides light in the first direction and a second optical path that guides light arriving via the first optical path toward the light receiving surface.

Dependencies are inferred from the claim text.