Metrology method and associated metrology device
AssigneeASML Netherlands B.V.
InventorsMustafa Ümit ARABUL, Zili ZHOU, Nitesh PANDEY, Coen Adrianus VERSCHUREN, Willem Marie Julia Marcel COENE, Peter Gerard STEENEKEN, Gerard Jan VERBIEST
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Abstract
Disclosed is a cantilever probe arrangement for a photoacoustic sub-surface atomic force microscope comprising: a cantilever arm; at least one probe element attached to the cantilever arm and comprising a cross-sectional area which decreases away from the cantilever arm towards a tip of the probe element; and at least one focusing structure operable to focus acoustic waves generated on the cantilever arm on said tip of the at least one probe element.
Claims16
-15. (canceled)
A cantilever probe arrangement for a photoacoustic sub-surface atomic force microscope comprising:
- a cantilever arm;
- at least one probe element attached to the cantilever arm and comprising a cross-sectional area that decreases in size away from the cantilever arm towards a tip of the probe element;
- and
- at least one focusing structure operable to focus acoustic waves generated on the cantilever arm on the tip of the at least one probe element.
Dependencies are inferred from the claim text.