Hydrogen detection device and method for manufacturing the same
AssigneeNuvoton Technology Corporation Japan
InventorsKazunari HOMMA, Koji KATAYAMA, Tomohiro MINAGAWA, Ken KAWAI, Satoru ITO
Life of this patent
Estimating the term…
Loading patent…
AssigneeNuvoton Technology Corporation Japan
InventorsKazunari HOMMA, Koji KATAYAMA, Tomohiro MINAGAWA, Ken KAWAI, Satoru ITO
Estimating the term…
A hydrogen detection device includes: a bridge circuit including a first resistive element (hydrogen sensor), a second resistive element (reference element), a third resistive element (reference element), and a fourth resistive element (reference element). Each of the first to fourth resistive elements is provided on a semiconductor substrate and includes: first and second electrodes whose principal surfaces face each other; a metal oxide layer disposed in contact with the principal surfaces of the first and second electrodes; and insulating film and the like covering the second electrode and the like, and in at least the first resistive element among the first to fourth resistive elements, the insulating film and the like include an opening that is not covered by the insulating film and the like and through which an other surface of the second electrode opposite to the principal surface of the second electrode is exposed.
A hydrogen detection device comprising:
A manufacturing method for manufacturing a hydrogen detection device that includes a bridge circuit including a first resistive element, a second resistive element, a third resistive element, and a fourth resistive element, the manufacturing method comprising:
Dependencies are inferred from the claim text.