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US 2026/0227348 A1Published application
Radiation beam scanning optical system and inspection apparatus
AssigneeHamamatsu Photonics K.K.
InventorsAkihito UCHIKADO, Tomonori NAKAMURA, Tomoyuki OKADA, Toru MATSUMOTO, Masataka IKESU
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Abstract
An X-ray beam scanning optical system includes an X-ray source that outputs an X-ray beam R1 toward a semiconductor device, a first capillary lens that renders the X-ray beam R1 output from the X-ray source into an X-ray beam R2 that is parallel X-rays, a second capillary lens that condenses the X-ray beam R2 having passed through the first capillary lens on the semiconductor device, and a shielding member disposed between the X-ray source and the semiconductor device.
Claims13
A radiation beam scanning optical system comprising:
- a radiation source configured to output a radiation beam toward an object;
- a first capillary lens configured to render the radiation beam output from the radiation source into parallel light;
- a second capillary lens configured to condense the radiation beam having passed through the first capillary lens on the object;
- a shielding member disposed between the radiation source and the object;
- a driver configured to move the second capillary lens;
- and
- a controller configured to control the driver to move the second capillary lens such that the radiation beam condensed on the object is scanned while a state where an optical axis at an emission end of the first capillary lens and an optical axis at an incident end of the second capillary lens are parallel is maintained.
4 more elements
Dependencies are inferred from the claim text.