Methods and systems for predicting substrate process emissions chemistry

A system comprising:

• a memory;
• and
• a set of one or more processing devices coupled to the memory, wherein the set of one or more processing devices is to:
• generate training data for training a machine learning model to predict emissions characterization data for a respective process recipe, wherein to generate the training data, the set of one or more processing devices is to:
• generate a training input comprising a process recipe associated with one or more operations of a historical process performed using one or more manufacturing equipment;
• and
• generate a target output for the training input, wherein the target output comprises historical emissions characterization data collected for the one or more operations of the historical process, wherein the historical emissions characterization data comprises one or more of an indication of one or more emissions gases produced based on the one or more operations of the historical process in accordance with the process recipe, or an indication of an amount of each of the one or more emission gases;
• and
• provide the training data to train the machine learning model on (i) a set of training inputs comprising the training input and (ii) a set of target outputs comprising the target output.

A non-transitory computer readable medium comprising instructions that, when executed by a set of one or more processing devices, cause the set of one or more processing devices to:

• identify a process recipe for one or more operations of a process to be performed using one or more manufacturing equipment;
• provide the process recipe as an input to an artificial intelligence (AI) model trained to predict emissions characterization data for operations of a respective process based on a given process recipe;
• obtain one or more outputs of the AI model indicating emissions characterization data associated with the one or more operations of the process, wherein the emissions characterization data comprises one or more of:
• an indication of one or more emission gases produced based on the one or more operations of the process in accordance with the process recipe, or
• an indication of an amount of each of the one or more emission gases;
• determine whether the emissions characterization data associated with the one or more operations satisfies one or more emission criteria;
• and
• responsive to determining that the emissions characterization data associated with the one or more operations satisfies the one or more emission criteria, perform the one or more operations of the process using the one or more manufacturing equipment in accordance with the process recipe.